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The Xetch XT etcher for etching larger substrates or large batches of non wafer substrates.
The company was given the award for its efforts in supplying Intel with semiconductor capital equipment, litho track, dry etcher, surface preparation cleaning systems, diffusion furnace and wafer probers.
AMD selected several types of etchers, including the company's latest Applied Centura(R) Enabler(R) and Producer(R) Dielectric Etch systems for etching advanced copper/low k interconnects.
Product lines include coater/developers, thermal processing system, dry etchers, CVD systems, wet cleaning systems, and test systems.