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etch
(redirected from etches)

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? Mentioned in ? References in periodicals archive
 
Typical applications for the 901ACS include nitride etch, photoresist descum, polyimide and BCB etches, zero layer etch, backside etch, isotropic oxide etch, non-critical polysilicon etch and titanium/tantalum alloy etch.
Tegal Receives Repeat Order for 900ACS Series Etch Tool from Leading ... by Business Wire
Timed etches simply cannot deliver this degree of accuracy.
Trikon's in-Situ End Point Detection Increases Yield and Reduces Cost ... by Business Wire
Typical applications for the 901e include nitride etch, photoresist descum, polyimide and BCB etches, zero layer etch, backside etch, isotropic oxide etch, non-critical polysilicon etch and titanium/tantalum alloy etch.
Tegal Receives Order for 900 Series Etch System from Australian MEMS ... by Business Wire
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