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SOPHI-30" is an ion implanter to perform low-acceleration and high-concentration ion implantation achieving extremely high productivity by reducing the process time to 1/60 in comparison by ULVAC previous models.
As the industry moves toward smaller device geometries, the new VIISta 810 HP (High Productivity) implanter is the optimum successor to the industry-leading VIISta 810 implanter," said John Aldeborgh, vice president of sales and marketing for Varian Semiconductor.
This space charge effect must be accounted for in the implanter design so that the beam is refocused as it passes through the implanter.